Chapter 1: Nano- and microscience, engineering and technology p.1-- Chapter 2: Nano - and microscale systems , devices, and structures p.19-- Chapter 3: Nano - and microsystems: Classification and consideration p.53-- Chapter 4: Fundamentals of microfabrication and MEMS fabrication technologies p.97-- Chapter 5: Devising and synthesis of NEMS and MEMS p.135-- Chapter 6: Modeling of micro- and nanoscale electromechanical p.191-- Chapter 7: Quantum mechanics and Its applications p.415-- Chapter 8: Molecular and carbon nanoelectronics p.487-- Chapter 9: Control of MEMS and NEMS p.539-- Chapter 10: Examples in synthesis, analysis, Design and fabrication of MEMS p. 645--
